Air Products expands Korea nitrogen fluoride plant
Air Products is more than doubling its nitrogen trifluoride (NF3) capacity at its production facility in Ulsan, Korea. The new capacity is expected to be onstream in the second half of 2012.
NF3 remains the chamber cleaning gas of choice for semiconductor, thin-film transistor liquid crystal display (TFT-LCD), and thin-film photovoltaic manufacturers, the company said.
Air Products pioneered the use of NF3 as a chamber cleaning gas and has been safely manufacturing and distributing the product for more than 30 years, it said.
"With the market for NF3 tight and the major OEMs committed to NF3 for their next generation processes, we felt the time was right to maximize our existing infrastructure and make this cost effective expansion," said Wayne Mitchell, vice president and general manager of electronics for Air Products.
"We remain committed to the chamber cleaning business and plan on growing with our strategic customers and developing the products they need to produce the latest devices in consumer electronics,” he added.
Besides Ulsan, Air Products operates three independent NF3 plants at its electronic specialty materials manufacturing facility in Hometown, Pa.
The independent NF3 facilities in the US and Korea offer Air Products' customers significant security of supply, the company said.
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